IONS4SET : Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology Imatge Funding agency European Commission Reference H2020-ICT-2015-688072 Period dl., 01/02/2016 - 12:00 - dv., 31/01/2020 - 12:00 P.I. at IMB-CNM Pérez Murano, Francesc