Technological development of intracellular polysilicon-chromium-gold chips for orthogonal chemical functionalization

Taking advantage of the ability of microelectronics to manufacture devices under cell dimensions and a large variety of features, we report a technology for the fabrication of multi-material chips as bi-functional cell-internalizable devices. These microtools have a promising future as intracellular functional platforms for biosensing, diagnosis and drug delivery.
Sensors and Actuators B. Chemical, 209, 212-224 (2015)