IONS4SET : Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology Imatge Funding agency European Commission Reference H2020-ICT-2015-688072 Period Mon, 02/01/2016 - 12:00 - Fri, 01/31/2020 - 12:00 P.I. at IMB-CNM Pérez Murano, Francesc