The Clean Room facility and complementary services of IMB-CNM are especially well suited for R+D projects due to the flexibility of their processes.

The main facilities of IMB-CNM are the Integrated Micro and Nanofabrication clean room and some complementary laboratories for microsystems processes, device packaging and electrical characterization. All together, these facilities are considered a “Singular Scientific and Technological Infrastructure” (ICTS) by the Spanish Ministry of Science and Innovation.

Download a brochure describing the ICTS "Integrated Micro and Nanofabrication Clean Room". 

The Clean Room facility of IMB-CNM includes equipment for micro and nanofabrication processes based on silicon technology. Its structure allows a highly flexible operation, which makes it especially well suited for R+D+I projects. Its activity of processing and characterization of silicon devices is assured by the large experience and good skills of its staff and by the variety of available equipment.

In spite of this flexibility, the organisation, management and operational procedures are well established and can be considered as quasi-industrial. These procedures ensure the process quality in terms of reliability and stability, which are of vital importance for training and research purposes.

The available Clean Room technologies are well established and not mere processes linked together; thus, reproducible results are obtained with standard production yields and reliability. It is worth noting that a complete range of processes is offered, which allows the existence of operative technologies, which cover from the design of the devices to their encapsulation and test, going through the complete fabrication process (front-end and back-end processes).

The recently renovated Integrated Micro and Nanofabrication Clean Room of CNM-IMB includes a number of nanofabrication tools. This allows the integration of nanolithography with other micro and nanofabrication processes for the fabrication of nanostructures, nanodevices and nanosystems, which can be integrated into silicon microsystems.

The Microsystems Laboratory is specifically designed to include the silicon micromachining processes and characterization tools. It makes microsystem-specific technologies available to the academic and industrial communities.