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DOCUMENTS AND INFORMATION RELATED TO THE OPERATION OF THE "Integrated Micro and Nanofabrication Clean ROOM"
Until they can be located in a specific ICTS Portal, this section of the IMB-CNM web contains information, documents and forms about the ICTS which can be downloaded. The documents refer to the operation of the ICTS and the access to it, specifically concerning the Clean Rooms.
General Information
- 1- Clean Room operating and access times
With the exception of the authorized surveillance and cleaning personnel, the access time in working days is from 8:00 h to 20:00 h for the ICTS staff, and from 08:30 h to 19:30 h for other personnel (duly authorized, appearing in the REPAS list). In non-working days the Clean Room cannot be accessed, except by the surveillance personnel.
Any exception to this timetable must be explicitly approved by the Direction.
To download a document, click on its name. Most documents are written in Spanish.
|
Type
|
Name
|
Status
|
Content
|
| Note |
GICORG 0 |
Current v 8.2 |
Requirements and knowledge to ACCESS the ICTS clean room |
| Protocol |
|
Current v 8.1 |
Knowledge protocol to access the main CR (requires signature) |
| Protocol |
|
Current v 2.2 |
Knowledge protocol to access the Basement CR (requires signature) |
| Note |
GICORG 3 |
Current v 4.1 |
Description of the process for user qualification |
| Note |
|
Current v 4.1 |
Description of the process for ordering runs ("encomienda" method) |
| Note |
GICORG 6 |
Current v 1.1 |
Price list for ICTS access and use (Under revision)
|
| Note |
GICORG 9 |
Current v 1.0 |
Forms used within the ICTS |
| Note |
GICORG 10-1 |
Current v 2.1 |
Specific procedures and norms for the NANO Area of the ICTS |
| Note |
GICORG 11 |
Current v 2.9 |
Functional structure of the ICTS of IMB-CNM |
| Note |
GICORG 12 |
Current v 3.3 |
Description of the process for ordering masks/reticles to the ICTS |
| Video Clip |
SAS1 |
Current
|
Video clip on entering the CR through SAS1 |
| Video Clip |
SAS2 |
Current
|
Video clip on entering the CR through SAS2 |
| Video Clip |
BEHAV |
Current
|
Video clip on recommended procedures in CR |
Video Clip
|
ALARMS |
Current
|
Video clip showing the alarm sounds
|
| List/Register |
|
Current v 1.1 |
List of equipment open to qualified self service |
| List/Register |
EQUIPOS |
Current v 1.0 |
List of equipment installed in the ICTS |
| Form |
1-190309-PR-1 |
Current |
Application form for qualification 0.1 (access to Clean Room) |
| Form |
2-190309-PR-2 |
Current |
Application form for qualification 0.2 (access to Clean Room) |
| Form |
3-170409-GO4-1 |
Current |
External project description form ("encomienda" method) |
| Form |
|
Current
|
Application form for a "special task" at the Microsystems laboratory ("encomienda" method) |
| Form |
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Current |
Application form for a "special task" at Nanolithography ("encomienda" method)
|
| Form |
6-150509-LUC-1 |
Current
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Application form for qualification in one equipment
|
| Form |
|
Current
|
Hardlock key request form to operate the RAITH 150 Two machine |
| Form |
10-200311-MASK-1 |
Current |
Form for ordering masks |
| Form |
11-010611-SE-1 |
Current |
Form for ordering packaging services |
| Note |
2011 Calendar |
Current |
ICTS Calendar for 2011 |
| Layout |
|
Current
|
Floor Plan of the Clean Room |
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Facilities and ICTS 
