The main research line of the group is focused on the development of novel Micro- and Nano Tools (MEMS/NEMS) whose functionality is determined by their functional components, which have dimensions at the scale of microns or nanometers, in order to explore new applications or functions.
Activities are divided into three sub-lines.
Technological research sub-line
New fabrication technologies and processes, mainly based on silicon, are explored. The compatibility between micromachining techniques and nanotechnologies is the main challenge.
Design and modeling research sub-line
The aim is to obtain innovative devices. The simulations will be based on macroscopic physical models and they will be extrapolated to micro- and nanoscale models.
Experimental-characterization research sub-line
Device performance and the results will be compared with the simulated models.
Currently these developments are mainly focused on intracellular chips (sensors and actuators) for cell biology and piezoelectric materials for energy harvesting.