|The main activities of this laboratory deal with:
Parametric test system:
Semi-automatic parametric test station, based on a Süss Microtech PA200 semi-automatic prober and an Agilent 41000 Parametric Test System. It has 4 SMU units, a CV meter and a switching matrix. Connection to the wafer is done through probecard.
General purpose on-wafer measurement equipment:
Three semi-automatic wafer probers (MPI TS2000-SE, Wentworth AWP 1050 and Süss Microtech PA200) are available. Wafer can be contacted both using micromanipulators or probecard. They can be used together with the available electric measurement equipment: three Semiconductor Parameter Analyzers (an Agilent 4155B and two Keithley 4200, both including 4 SMU and one Keithley 4200 with a CV module), CV measurement equipment (HP4280A, HP4192A and HP4140B), and other auxiliary small equipment. There are also available one manual wafer probers with thermal chuck (Micromanipulator 4060).